✦ LIBER ✦
12 kV low current cascaded light triggered switch on one silicon chip
✍ Scribed by V. Mankowski; U. Hilleringmann; K. Schumacher
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 1008 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
✦ Synopsis
A new insulation technique for lateral high voltage switch devices has been developed. Applying deep trench etching, backside etching and wafer dicing completely insulated silicon islands have been generated on wafer level. Each island contains a photo bipolar transistor to allow an optical control of the device. The transistors have been connected in line to achieve blocking voltages of 12 kV. The entire chip size of the HV device is about 30 n21Tl 2.