✦ LIBER ✦
1196. Preparation of Ta2O5 thin films by three-electrode cathodic sputtering: C Grochowski and Z Maczenski, Elektronika, 12 (3), 1971, 94–96 (in Polish)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 134 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.