1122. Methods for checking defect structure of silicon dioxide films on silicon plates: Yu M Agrikov et al, elektron tekh microelektron, 4, 1970, 69–72 (in Russian).

• Book ID: 103453312
• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 130 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92283-4