1104. The nature and habit planes of defects in P+ ion-implanted silicon: K Sesham and J Washburn, Phys Stat Sol (a), 26 (1), 1974, 345–352

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 134 KB
• Volume: 25
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(75)91683-8