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1103. Sputter-ion pumps for low pressure operations: S. L. Rutherford, Trans. 10 Nat. Vac. Symp., New York, 1963, 185–190


Book ID
103443318
Publisher
Elsevier Science
Year
1964
Tongue
English
Weight
83 KB
Volume
14
Category
Article
ISSN
0042-207X

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