110. Substrate damage in film thickness measurement by beam interferometry.: Letter by G. D. Scott, Nature, 184, Suppl. No. 6, p. 354–355, 1 Aug. 1959

• Book ID: 103442835
• Publisher: Elsevier Science
• Year: 1960
• Tongue: English
• Weight: 97 KB
• Volume: 10
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(60)90266-9