𝔖 Bobbio Scriptorium
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109 watt KrF and ArF molecular lasers

✍ Scribed by G.C. Tisone; A.K. Hays; J.M. Hoffman


Book ID
103316375
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
194 KB
Volume
18
Category
Article
ISSN
0030-4018

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Hexamethyldisiloxane (HMDSO) is used as coating material in a conventional ECR-PECVD process. By simply adjusting the gas flow rate ratio, the material can be varied to have suitable optical constants for making bottom antireflective coating (BARC) layers working at both 248 nm and 193 nm wavelength