1085. Automated pumping system and control of apparatus for vacuum deposition of thin films: A A Alekseev et al, elektron tekh mikroelektron, 3, 1970, 136–142 (in Russian).

• Book ID: 103453275
• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 137 KB
• Volume: 21
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(71)92246-9