1056. Apparatus for the vacuum deposition of semiconducting-compound films: Yu Z Bubnov et al,USSR Patent No 309416, appl 17th Feb 1970, publd 11th Aug 1971

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 146 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)91779-4