1055. A vacuum-deposition apparatus with an electron-beam evaporator: Yu P Terent'ev et al,Electronics Industry Scientific-Technical Collection, No 3 (1971), 62, (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 146 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)91778-2