✦ LIBER ✦
1010. Development of an apparatus for the doping of silicon by activated phosphorous ions: P Glotin and J Grapa,Le Vide, 21 (126), Nov–Dec 1966, 459–466 (in French)
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 139 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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