[100] Silicon doped with arsenic II. The connection of electrical and structural parameters with microplasmas

✍ Scribed by Magden, I. N. ;Safonov, V. A.

• Publisher: John Wiley and Sons
• Year: 1976
• Tongue: English
• Weight: 366 KB
• Volume: 38
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2210380103