✦ LIBER ✦
10-nm-thick quinary (AlCrTaTiZr)N film as effective diffusion barrier for Cu interconnects at 900 °C
✍ Scribed by Chang, Shou-Yi; Chen, Dao-Sheng
- Book ID
- 118739974
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 746 KB
- Volume
- 94
- Category
- Article
- ISSN
- 0003-6951
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